{"id":571,"date":"2013-12-12T14:43:06","date_gmt":"2013-12-12T05:43:06","guid":{"rendered":"http:\/\/kir492785.kir.jp\/optronics\/blog\/?p=571"},"modified":"2013-12-12T14:46:41","modified_gmt":"2013-12-12T05:46:41","slug":"%e5%8d%8a%e5%b0%8e%e4%bd%93%e7%94%a3%e6%a5%ad%e5%b8%82%e5%a0%b4%e3%81%ae%e6%98%8e%e6%97%a5%e3%81%af%e3%81%a9%e3%81%a3%e3%81%a1%e3%81%a0","status":"publish","type":"post","link":"https:\/\/www.optronics.co.jp\/blog\/?p=571","title":{"rendered":"\u534a\u5c0e\u4f53\u7523\u696d\u5e02\u5834\u306e\u660e\u65e5\u306f\u3069\u3063\u3061\u3060"},"content":{"rendered":"<p><a href=\"http:\/\/kir492785.kir.jp\/optronics\/blog\/wp-content\/uploads\/2013\/12\/\u30bb\u30df\u30b3\u30f3.jpg\"><img loading=\"lazy\" decoding=\"async\" src=\"http:\/\/kir492785.kir.jp\/optronics\/blog\/wp-content\/uploads\/2013\/12\/\u30bb\u30df\u30b3\u30f3.jpg\" alt=\"\u30bb\u30df\u30b3\u30f3\" width=\"408\" height=\"306\" class=\"alignnone size-full wp-image-572\" srcset=\"https:\/\/www.optronics.co.jp\/blog\/wp-content\/uploads\/2013\/12\/\u30bb\u30df\u30b3\u30f3.jpg 408w, https:\/\/www.optronics.co.jp\/blog\/wp-content\/uploads\/2013\/12\/\u30bb\u30df\u30b3\u30f3-300x225.jpg 300w\" sizes=\"(max-width: 408px) 100vw, 408px\" \/><\/a><\/p>\n<p>\u3000\u5148\u9031\uff0812\u67084\uff5e6\u65e5\uff09\u3001\u5e55\u5f35\u30e1\u30c3\u30bb\u3067\u884c\u306a\u308f\u308c\u305f\u30bb\u30df\u30b3\u30f3\u30fb\u30b8\u30e3\u30d1\u30f32013\u3002\u4e3b\u50ac\u8005\u767a\u8868\u306b\u3088\u308c\u3070\u3001\u5c55\u793a\u4f1a\u51fa\u5c55\u8005\u6570\u306f\u5171\u540c\u51fa\u5c55\u8005\u3092\u542b\u3081671\u793e\/\u56e3\u4f53\u3001\u51fa\u5c55\u5c0f\u9593\u6570\u306f1,612\u5c0f\u9593\u3001\u51fa\u5c55\u56fd\u657017\u56fd\/\u5730\u57df\u3001\u5ef6\u3079\u6765\u5834\u8005\u6570\u306f57,029\u4eba\u3068\u3044\u3046\u898f\u6a21\u3067\u3057\u305f\u3002<br 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\/>\n\u3000\u534a\u5c0e\u4f53\u5206\u91ce\u306e\u6280\u8853\u958b\u767a\u30c8\u30ec\u30f3\u30c9\u306f\u3001450mm\u30a6\u30a8\u30cf\u30683D-IC\u306e\u3088\u3046\u3067\u3059\u3002\u3044\u304b\u306b\u5927\u304d\u306a\u30b5\u30a4\u30ba\u306e\u30a6\u30a8\u30cf\u3092\u7528\u3044\u3066\u4f4e\u30b3\u30b9\u30c8\u5316\u3092\u56f3\u308b\u304b\u30013D\u3067\u6027\u80fd\u3092\u30a2\u30c3\u30d7\u3055\u305b\u308b\u304b\u3068\u3044\u3046\u70b9\u304c\u6ce8\u76ee\u3055\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n<p>\u3000\u4eca\u56de\u306e\u5c55\u793a\u4f1a\u3001\u4f55\u6642\u3082\u306e\u3088\u3046\u306b\u5149\u3092\u5fdc\u7528\u3057\u305f\u6e2c\u5b9a\u8a55\u4fa1\u88c5\u7f6e\u304c\u304b\u306a\u308a\u591a\u304f\u51fa\u5c55\u3055\u308c\u3066\u3044\u307e\u3057\u305f\u304c\u3001\u3053\u3053\u3067\u306f\u305d\u308c\u4ee5\u5916\u3067\u76ee\u306b\u3064\u3044\u305f\u9732\u5149\u88c5\u7f6e\u306a\u3069\u3001\u30ec\u30fc\u30b6\u3092\u7528\u3044\u305f\u52a0\u5de5\u88c5\u7f6e\u3092\u7d39\u4ecb\u3057\u305f\u3044\u3068\u601d\u3044\u307e\u3059\u3002<\/p>\n<p><strong>\u3010\u30cb\u30b3\u30f3\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u3011<\/strong><br 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\/>\n\u3000\u307e\u305f\u3001\u5c0f\u578b\u30fb\u7c21\u5358\u30fb\u30ea\u30fc\u30ba\u30ca\u30d6\u30eb\u3092\u30b3\u30f3\u30bb\u30d7\u30c8\u306b\u3057\u305fMEMS\/LED\u88fd\u9020\u306b\u9069\u3057\u305f\u30df\u30cb\u30b9\u30c6\u30c3\u30d1\u300cNES1-h04\u300d\u3068\u300cNES2-h04\/h06\u300d\u3082\u30d1\u30cd\u30eb\u5c55\u793a\u3057\u3066\u3044\u307e\u3057\u305f\u3002\u3068\u3082\u306b\u6ce2\u9577\u306f405nm\u3001\u300cNES1-h04\u300d\u306f\u89e3\u50cf\u5ea62.0\u03bcm\u30676\u30a4\u30f3\u30c1\u307e\u3067\u5bfe\u5fdc\u3001\u300cNES2-h04\/h06\u300d\u306f\u89e3\u50cf\u5ea62.0\u03bcm\u4e26\u3073\u306b3.0\u03bcm\u30678\u30a4\u30f3\u30c1\u307e\u3067\u306b\u5bfe\u5fdc\u3059\u308b\u3068\u306e\u4e8b\u3067\u3059\u3002<\/p>\n<p><strong>\u3010\u30a6\u30b7\u30aa\u96fb\u6a5f\u3011<\/strong><br \/>\n\u3000UX\u30b7\u30ea\u30fc\u30ba\u306e\u4e2d\u306e2.5D\/3D\u30d1\u30c3\u30b1\u30fc\u30b8\u5411\u3051\u9732\u5149\u88c5\u7f6e\u300cUX7-3Di\u300d\u3092\u30d1\u30cd\u30eb\u5c55\u793a\u300212\u30a4\u30f3\u30c1\u30a6\u30a8\u30cf\u306b\u5bfe\u5fdc\u3067\u304d\u3001\u89e3\u50cf\u529b\u306f2\u03bcm L\/S\u3092\u9054\u6210\u3057\u3066\u3044\u307e\u3059\u3002<br \/>\n\u3000\u4e00\u65b9\u3001\u30d0\u30f3\u30c9\u30d1\u30b9\u30d5\u30a3\u30eb\u30bf\u3084ND\u30d5\u30a3\u30eb\u30bf\u306e\u5fc5\u8981\u304c\u306a\u304fi\u7dda\u3001h\u7dda\u3001g\u7dda\u306e\u5404\u6ce2\u9577\u3054\u3068\u306e\u51fa\u529b\u8abf\u6574\u3084\u9732\u5149\u30bf\u30a4\u30df\u30f3\u30b0\u304c\u5236\u5fa1\u3067\u304d\u308b\u3001LED ollimation Technology\uff08LCT\uff09\u3092\u7528\u3044\u305f\u540c\u793e\u306e\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u7528LED\u5149\u6e90\u306f\u9577\u5bff\u547d\u3001\u4f4e\u6e29\u51e6\u7406\u3001\u30b7\u30f3\u30d7\u30eb\u306a\u5149\u5b66\u6a5f\u69cb\u3092\u5b9f\u73fe\u3059\u308b\u3068\u306e\u4e8b\u3067\u3059\u3002<\/p>\n<p><strong>\u3010\u65e5\u672c\u88fd\u92fc\u6240\u3011<\/strong><br \/>\n\u3000\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u30a2\u30cb\u30fc\u30eb\uff08ELA\uff09\u30b7\u30b9\u30c6\u30e0\u3068\u30cf\u30a4\u30d6\u30ea\u30c3\u30c9\u56fa\u4f53\u30ec\u30fc\u30b6\uff08Hybrid Advanced disc Laser\uff1aHADL\uff09\u30a2\u30cb\u30fc\u30eb\u30b7\u30b9\u30c6\u30e0\u3001\u30ec\u30fc\u30b6\u5fae\u7d30\u7a74\u52a0\u5de5\u88c5\u7f6e\u3092\u30d1\u30cd\u30eb\u5c55\u793a\u3057\u3066\u3044\u307e\u3057\u305f\u3002<br \/>\n\u3000ELA\u30b7\u30b9\u30c6\u30e0\u306fELAMOD\uff08Excimer Laser Assisted Metal Organic Decomposition\uff09\u6cd5\u3092\u63a1\u7528\u3001\u4f4e\u6e29\u30dd\u30ea\u30b7\u30ea\u30b3\u30f3TFT\u30d5\u30e9\u30c3\u30c8\u30d1\u30cd\u30eb\u30c7\u30a3\u30b9\u30d7\u30ec\u30a4\u88fd\u9020\u306b\u304a\u3051\u308b\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30b7\u30ea\u30b3\u30f3\u819c\u306e\u7d50\u6676\u5316\u306b\u7528\u3044\u3089\u308c\u3066\u3044\u307e\u3059\u304c\u3001\u540c\u793e\u3067\u306f\u305d\u308c\u4ee5\u5916\u306e\u5fdc\u7528\u88fd\u54c1\u306e\u958b\u767a\u306b\u3082\u53d6\u308a\u7d44\u3093\u3067\u3044\u308b\u3068\u306e\u4e8b\u3067\u3059\u3002<br \/>\n\u3000HADL\u30a2\u30cb\u30fc\u30eb\u30b7\u30b9\u30c6\u30e0\u306f\u3001LD\u304b\u3089\u306e808nm\u3068Yb-YAG\u30ec\u30fc\u30b6\u306e\u7b2c\u4e8c\u9ad8\u8abf\u6ce2515nm\u306e2\u6ce2\u9577\u3092\u4f7f\u3046\u4e8b\u30670.3\uff5e3\u03bcm\u306e\u7bc4\u56f2\u306e\u6d3b\u6027\u5316\u6df1\u3055\u306e\u5236\u5fa1\u304c\u53ef\u80fd\u3002\u30ec\u30fc\u30b6\u5fae\u7d30\u7a74\u52a0\u5de5\u88c5\u7f6e\u306fKrF\u30a8\u30ad\u30b7\u30de\u30ec\u30fc\u30b6\u306e\u6ce2\u9577248nm\u3092\u4f7f\u7528\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n<p><strong>\u3010\u30c7\u30a3\u30b9\u30b3\u3011<\/strong><br \/>\n\u3000\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u3092\u5b9f\u73fe\u3059\u308b\u30ec\u30fc\u30b6\u30bd\u30fc\u300cDFL7161\u300d\u3092\u5b9f\u6a5f\u5c55\u793a\u3057\u3066\u3044\u307e\u3057\u305f\u3002\u30a2\u30d6\u30ec\u30fc\u30b7\u30e7\u30f3\u306b\u3088\u3063\u3066\u3001\u30ef\u30fc\u30af\u3078\u306e\u71b1\u30c0\u30e1\u30fc\u30b8\u304c\u307b\u3068\u3093\u3069\u306a\u3044\u3001\u885d\u6483\u3084\u8ca0\u8377\u304c\u5c11\u306a\u3044\u3001\u52a0\u5de5\u96e3\u6613\u5ea6\u304c\u9ad8\u3044\u786c\u8cea\u306a\u30ef\u30fc\u30af\u306b\u3082\u5bfe\u5fdc\u3001\u5e4510\u03bcm\u4ee5\u4e0b\u306e\u5fae\u7d30\u30b9\u30c8\u30ea\u30fc\u30c8\u3082\u52a0\u5de5\u53ef\u80fd\u3068\u3044\u3046\u7279\u9577\u3092\u6709\u3057\u3066\u3044\u307e\u3059\u3002<br \/>\n\u3000\u3053\u306e\u4ed6\u3001\u30ec\u30fc\u30b6\u3092\u7528\u3044\u305f\u30b9\u30c6\u30eb\u30b9\u30c0\u30a4\u30b7\u30f3\u30b0\u7528\u30e2\u30c7\u30eb2\u6a5f\u7a2e\u300cDFL7341\u300d\u3068\u300cDFL7361\u300d\u3082\u5b9f\u6a5f\u5c55\u793a\u3057\u3066\u3044\u307e\u3057\u305f\u3002<\/p>\n<p><strong>\u3010\u30ad\u30e4\u30ce\u30f3\u30de\u30fc\u30b1\u30c6\u30a3\u30f3\u30b0\u30b8\u30e3\u30d1\u30f3\u3011<\/strong><br \/>\n\u30003DSYSTEMS\u793e\u88fd\u306e\u7523\u696d\u75283D\u30d7\u30ea\u30f3\u30bf\u3092\u30d1\u30cd\u30eb\u5c55\u793a\u3002\u30ec\u30fc\u30b6\u3092\u7528\u3044\u305f\u91d1\u5c5e\u7c89\u672b\u713c\u7d503D\u30d7\u30ea\u30f3\u30bf\u300cPhenix\u30b7\u30ea\u30fc\u30ba\u300d\u30013D\u30ec\u30fc\u30b6\u30d3\u30fc\u30e0\u30d7\u30ea\u30f3\u30bf\u300cProjet6000\/7000\u30b7\u30ea\u30fc\u30ba\u300d\u3001\u5149\u9020\u5f623D\u30d7\u30ea\u30f3\u30bf\u300ciPro\u30b7\u30ea\u30fc\u30ba\u300d\u3001\u6a39\u8102\u7c89\u672b\u713c\u7d503D\u30d7\u30ea\u30f3\u30bf\u300csPro\u30b7\u30ea\u30fc\u30ba\u300d\u304c\u7d39\u4ecb\u3055\u308c\u3066\u3044\u3066\u3001\u5b9f\u969b\u306b\u4f5c\u3063\u305f\u9020\u5f62\u54c1\u3082\u5c55\u793a\u3055\u308c\u3066\u3044\u307e\u3057\u305f\u3002<\/p>\n<p>\u3000\u6db2\u6d78\u65b9\u5f0f\u3092\u542b\u3080\u73fe\u72b6\u306eArF\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u88c5\u7f6e\u3067\u5927\u304d\u306a\u30b7\u30a7\u30a2\u3092\u6709\u3057\u3001EUVL\u306e\u7814\u7a76\u30fb\u958b\u767a\u306b\u6ce8\u529b\u3059\u308bASML\u306f\u4eca\u5e74\u3082\u51fa\u5c55\u3057\u3066\u3044\u307e\u305b\u3093\u3067\u3057\u305f\u3002\u65e5\u672c\u5e02\u5834\u306b\u306f\u9b45\u529b\u3092\u611f\u3058\u306a\u3044\u3063\u3066\u4e8b\u3067\u3057\u3087\u3046\u304b\uff1f<br \/>\n\u3000SEMI\u306e\u767a\u8868\u306b\u3088\u308c\u3070\u30012013\u5e74\u306e\u4e16\u754c\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u5e02\u5834\u306f\u3001\u5bfe\u524d\u5e74\u6bd413.3\uff05\u6e1b\u306e320\u5104\u30c9\u30eb\u3068\u4e88\u6e2c\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u4eca\u56de\u306e\u5c55\u793a\u4f1a\u3001\u5165\u5834\u8005\u6570\u306f\u5897\u3048\u305f\u3082\u306e\u306e\u51fa\u5c55\u8005\u6570\u30fb\u5c0f\u9593\u6570\u304c\u5927\u304d\u304f\u3078\u3053\u3093\u3060\u3068\u3044\u3046\u7d50\u679c\u306f\u3001\u305d\u306e\u5f71\u97ff\u3082\u3042\u308b\u306e\u3067\u3057\u3087\u3046\u3002<br 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class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[10],"tags":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.optronics.co.jp\/blog\/index.php?rest_route=\/wp\/v2\/posts\/571"}],"collection":[{"href":"https:\/\/www.optronics.co.jp\/blog\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.optronics.co.jp\/blog\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.optronics.co.jp\/blog\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.optronics.co.jp\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=571"}],"version-history":[{"count":1,"href":"https:\/\/www.optronics.co.jp\/blog\/index.php?rest_route=\/wp\/v2\/posts\/571\/revisions"}],"predecessor-version":[{"id":573,"href":"https:\/\/www.optronics.co.jp\/blog\/index.php?rest_route=\/wp\/v2\/posts\/571\/revisions\/573"}],"wp:attachment":[{"href":"https:\/\/www.optronics.co.jp\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=571"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.optronics.co.jp\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=571"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.optronics.co.jp\/blog\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=571"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}